By John F. O'Hanlon
Within the decade and a part because the ebook of the second one variation of A User?s consultant to hoover know-how there were many vital advances within the box, together with spinning rotor gauges, dry mechanical pumps, magnetically levitated rapid pumps, and ultraclean process designs. those, in addition to enhanced cleansing and meeting options have made contamination-free production a truth. Designed to bridge the distance in either wisdom and coaching among designers and finish clients of vacuum apparatus, the 3rd variation deals a pragmatic viewpoint on today?s vacuum know-how. With a spotlight at the operation, realizing, and choice of kit for commercial procedures utilized in semiconductor, optics, packaging, and comparable coating applied sciences, A User?s consultant to hoover know-how, 3rd variation offers an in depth therapy of this crucial box. whereas emphasizing the basics and referring to major issues now not properly lined somewhere else, the textual content avoids subject matters no longer appropriate to the common consumer.
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Extra info for A User's Guide to Vacuum Technology
Ref. 2, pp. 135-205 and 291-337. 4. S. , J. M. , Wiley, New York, 1962, p. 35. 5. Langmuir, Phys. , 1, 337 (1913). 6. Ref. 6. 7. Ref. 4, p. 68. 8. H. von Ubisch, Vak. , 6, 175 (1957). 9. M. Pirani and J. Yarwood, Principles of Vacuum Engineering, Reinhold, New York, 1961. p. 100. 10. For example, see L. M. Lund and A. S. Berman, J. Appl. , 37,2489 (1966). 11. C. Neumann, Math Phys. , 24,49 (1872). 12. J. C. Maxwell, Philos. Trans. R. London, 170,231 (1879). 13. M. C. I. Siu, J. Vac. Sci. , 10,368 (1973).
The pressure is anisotropic. This is to be contrasted to the case of the two tubes connected by a chamber, which has a known pressure. In that case the only place where the pressure will differ is at the exit of the first tube as it enters the chamber as measured with a gauge looking upstream. That pressure will be higher than in the chamber. 3). If we examine Fig. 3) is measured in the large chambers at each end of the tube. By measuring the pressure in this way we include the pressure drop schematically shown at the end of the tube.
H. Davis. Copyright 1960, The American Institute of Physics. 0 I I ; b ; I UR I Ib I 1; 1 If I 1; I Fig. 7 Molecular transmission probability of an annular cylindrical pipe. Reprinted with permission from Le Vide, No. 103, p. 42, L. L. Levenson et d. Copyright 1963, Soci6t6 Francaise des Ingeneiurs et Techniciens du Vide. 0 I Fig. 8 Molecular transmission probability of a rectangular duct. Reprinted with permission fiom Le Vide, No. 103, p. 42, L. L. Levenson et al. Copyright 1963, Soci6t6 Francaise des Ingeneiurs et Techniciens du Vide.
A User's Guide to Vacuum Technology by John F. O'Hanlon